Our Particle Accelerator Approach

xLight is building the world’s most powerful Free Electron Lasers (FELs) by leveraging particle accelerator technology.

A particle accelerator is a device that accelerates charged particles, such as electrons or protons, to very high speeds using radiofrequency (RF) and magnetic fields. These accelerated particles can then be used for various purposes, including scientific research, medical treatments, and industrial applications.

FELs uses electrons from a particle accelerator and passes them through undulators with a periodic magnetic field to generate coherent, high-intensity light beams.

FELs are the core of xLight’s system because of their ability to produce intense, tunable beams of light across a wide range of wavelengths.

The electron gun that powers the Linac Coherent Light Source-II X-ray laser. Credit: Marilyn Chung/lawrence berkeley

  • Electrons are injected into the particle accelerator, then into the FEL

  • Then the electrons are passed through undulators with a periodic magnetic field

  • As the electrons travel through the undulator, they emit photons

  • Which creates coherent, high-intensity EUV light beams

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EUV Lithography Explained
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Applying FEL Technologies To Semiconductor Manufacturing