Applying FEL Technologies To Semiconductor Manufacturing

xLight’s EUV FEL unlocks a new paradigm for semiconductor manufacturing: Light as a utility.

Mature Core Technologies

Superconducting Accelerator (Credit: Fermilab)
Electron Guns (Credit: Berkeley Lab)
Optical Systems (Credit: XDS Oxford Mirror System)
Kicker Cavities
Superconductive RF Components (Credit: Fermilab)

The xLight EUV FEL is built on mature core technologies, which have been system engineered from decades of operations data and evolved to meet the requirements of high-volume manufacturing. Because of the maturity of the underlying technology, our system is more easily maintainable than today’s light sources and is also highly reliable.

Multiplexing and System Level Redundancy for High Availability

Our system utilizes both electron beam multiplexing and optical multiplexing. Proprietary xLight electron beam splitting enables unique tunability, power and polarization on a per-scanner basis. High-precision optical multiplexing enables a fleet of scanners to run from multiple independent accelerator driven EUV FEL systems to enable high availability.

Our system is fully redundant, which enables high availability at the scanner. Two identical copies of our EUV FEL support each facility, and with elastic resource allocation both are able to operate nominally at steady state. Through multiplexing, each of the systems are capable of fully powering the scanner fleet they enable individually, meaning that maintenance is never a blocker to sustained operations.

Our Particle Accelerator Approach