Building the ultimate light source for semiconductor manufacturing. 

The xLight mission is to commercialize particle accelerator technologies for critical U.S. economic and national security applications.

Our work is driven by the belief that the United States must regain and sustain leadership in semiconductor manufacturing.  

We have developed an extreme-ultraviolet (EUV) light source for leading-edge semiconductor device fabrication with significant competitive advantages in performance, productivity, and sustainability. The xLight source builds on mature particle accelerator technology with systems engineering focused on high-volume manufacturing requirements. As a result, this new source reliably delivers the features and tunability capable of transforming current manufacturing, while also enabling the lithography, metrology, and inspection capabilities needed for next-generation architectures and process nodes.

xLight's new EUV light source will enable U.S. leadership in the semiconductor industry of tomorrow.   

Who We Are

xLight is a venture-backed start-up based in Palo Alto, CA, led by a team of light source pioneers, lithographers, and particle accelerator builders. While small, our team has over a millennia of experience working across lithography and accelerator technologies.  

The company was founded with the mission to build a light source capable of revolutionizing lithography, metrology and inspection. Our work is driven by the belief that the United States must regain and sustain leadership in semiconductor manufacturing. 

The semiconductor industry is at a critical juncture and the geopolitical landscape is increasingly complicated. It is now essential for the United States to drive the domestic development of semiconductor manufacturing technologies for the sake of our economic and national security.  

That’s where we come in.  

 xLight leverages decades of investment and U.S. leadership in particle accelerator technology, infrastructure, and knowledge to rapidly develop and deploy our unique light source. Building on this foundation, we designed an HVM compatible system with novel capabilities that delivers productivity and performance to enable decades of continued advancement in leading-edge semiconductor manufacturing.